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AG Scheer
Mesoscopic Systems

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Infrastructure

Sample Preparation

State-of-the-art research requires appropriate equipment. We therefore prepare our samples in the Nanostructure Laboratory, which provides powerful tools in a cleanroom environment. Most important for our research are:

Sketch of an STM with x-y slip-stick positioner used in a helium bath cryostat
Non-magnetic STM with x-y slip-stick positioner used in a helium bath cryostat
  • Zeiss CrossBeam 1540XB: E-Beam Lithography and FIB Milling
  • Karl Süss MJB 3 Mask Aligner: Optical Lithography
  • Sentech SI 220: Reactive Ion Etching
  • SSE Opticoat SB20+: Resist Spin-Coater
  • tpt Wire Bonder HB06
  • nanofilm Ellipsometer EP3
  • Bal-Tec CPD 030 Critical Point Dryer
  • Chemical Hoods

A full list of the available equipment in the Nanolab can be found on the Öffnet externen Link im aktuellen FensterNanolab website.

In our labs, we also use the following devices:

  • 2 High Vacuum Thin Film Evaporation Plants: pressure < 5*10-9 mbar, gas injection system, sputter source
  • Philips/FEI XL30 SEM: E-Beam lithography
  • ThermoMicroscopes AFM

Measurement

Our measurement devices include:

    3He Cryostat equipped with a MCBJ mechanics.

  • Lake Shore CPX-VF Cryogenic Probe Station: 6 Probes, 4 K, up to 2.5 T
  • Oxford MX250 Dilution Refrigerator: magnetic field up to 10 T, temperature < 15 mK
  • Air Liquide Dilution Refrigerator: magnetic field up to 8 T, temperature 50 mK, MCBJ
  • BlueFors Dry Dilution Refrigerator: magnetic field up to 7 T, temperature < 10 mK, MCBJ
  • Oxford Heliox Dewars: 3-axis magnet, 10 and 14 T magnets
  • Scientific Magnetis Vector Magnet Dewar: up to 9 T in Z, 3 T in X

The following inserts can be used

  • Breakjunction mechanics in various inserts (4 K high bandwidth, 1.5 K general purpose, 300 mK high energy resolution)
  • Low-Temperature STM at 4 K and 300 mK